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Wafer Sheet Inspection System WIS-EAGLE
The WIS-EAGLE system is an intelligent camera system which checks the wafer sheets after baking for surface damage and deviations in shape and color. Only wafer sheets meeting the desired standard will be passed on.
WIS-EAGLE – Technical Data
  • camera system working with transmitted light method
  • continuous wafer sheet inspection within the production flow
  • up to 100 wafer sheets/min
  • freely adjustable tolerances
  • wafer sheet transport drive through dedicated motor or by coupling to upstream or downstream machine
WIS-EAGLE
WIS-EAGLE